Monitoring

Monitoring

The SC28 monitoring system is purpose-designed to monitor the environment for electron beam instruments, including Scanning Electron Microscopes (SEM), Transmission Electron Microscopes (TEM), Electron Beam Lithography tools and CDSEM tools.

It can log the spectrum and charts of ambient magnetic fields, vibrations, acoustic levels, temperature and relative humidity. It measures the magnetic fields, vibrations and acoustic levels at a frequency of 2 kHz and temperature/humidity at 1Hz or below. Measurements are taken continuously, with no gaps, so that no event is missed.

The SC28 software runs on a Windows PC that is connected to the same Local Area Network as the SC28/SI. It automatically detects the SC28/SI hardware without needing to know its IP address in advance. The SCplot program is included with the SC28 software and allows you to view and print results as well as save graphs for use in reports.

SC28 Features

  • Long term monitoring of the room environment for electron beam instruments, including Scanning Electron Microscopes (SEM), Transmission Electron
  • Microscopes (TEM) , Electron Beam Lithography tools and SEM-based metrology and inspection tools
  • Continuously measures Magnetic fields, Floor vibration in 3 axes, Acoustic levels at 2kHz, and Temperature/humidity at 1Hz
  • Inputs for 1 x 3-axis magnetic field sensor, 3 x Wilcoxon 731A accelerometers, Brüel & Kjær precision microphone, Temperature/Humidity sensor, and one BNC AUX
  • Up to 14 different graphs may be displayed giving simultaneous display of the data as it is acquired
  • Acquires sensor data and logs spectra and charts to date-stamped files
  • Headless - Can run without user interface open
  • Compares environment to specifications with PASS/FAIL indication. Sends signal to a traffic light or sends email if offline or out-of-spec
Download/Product Guide:
Download/Product Guide:

Blogs & Case Studies
November 2, 2023 - Vibration IsolationBlogs
Vibration Isolation for Cryo-TEM: Over 90% Measured Reduction at 2 Hz
Using a Cryo-TEM in structural biology imaging requires a stable platform to create the 3D images researchers demand. Unfortunately, many facilities that require Cryo-TEM instrumentation ...
Read More
October 4, 2023 - Vibration IsolationBlogs
Isolated Slabs: Do they work? What does the data say?
VEC works with many customers who either have installed or consider installing “Isolation Slabs” to isolate an instrument from building vibration and other sources of ...
Read More
April 12, 2023 - Site EvaluationsAcoustic AbatementBlogs
Acoustic Noise in Laboratories: Understanding the Problem & Finding Solutions
Laboratories are places where precision and accuracy are of utmost importance. Any external factor that affects the accuracy of the results can be disastrous. One ...
Read More
March 28, 2022 - Vibration IsolationBlogs
DVIA-M vs Piezoelectric Vibration Isolation Systems. Which is King?
The Daeil DVIA-M series vibration isolations system is the premier active vibration isolation system with excellent broadband vibration isolation and superior performance at low frequencies.
Read More
June 30, 2020 - Site EvaluationsVibration IsolationBlogs
Electron Microscope Vibration: An Increasing Issue in Today’s Laboratories
Electron microscope vibration is an increasing concern in modern laboratories because of improving resolution and extended duration imaging. At higher resolution, external vibrations have a ...
Read More
January 12, 2020 - Vibration IsolationBlogs
Active vs. Passive Vibration Isolation
Active vs. passive vibration isolation, understanding the difference is critical to mitigating the impacts of vibration on equipment performance. Passive isolation systems use the natural ...
Read More