Active Vibration Isolation System for Semiconductor, Metrology, and Inspection Tools
The DVIA-P series is an active pneumatic vibration isolation system for advanced processing, metrology, and inspection tools with onboard wafer loaders. The isolators use sensitive sensors and powerful pneumatic actuators to counteract vibrations from floors and tools, providing low-frequency isolation and ultra-fast settling time while accounting for the movement of onboard linear stages.
Superior Vibration Isolation Performance
Advanced feedback and feedforward vibration control algorithms are embedded in the DVIA-P, delivering 40 – 70% at 2 Hz in six degrees of freedom.
Custom Design Based on Unique Tool Footprint
Using site survey data VEC designs your DVIA-P isolation system based on the unique requirements of your tool.
Sophisticated Feedback & Feedforward Controls
A) Stage Feedforward
Stage feedforward counteracts movement from motorized stages by producing an equal and opposite force based on advanced information about the stage position.
B) Acceleration Feedback
The acceleration feedback system uses sensors and actuators to detect and minimize vibrations from the floor and motorized linear stages.
C) Position Feedback
Position feedback measures displacement through position sensors, and the digital controller drives actuators to return the isolated base to its original position, improving accuracy.
D) Floor Feedforward
The floor feedforward system filters floor vibrations based on known factors like applied force and ambient vibrations, and tunes feedforward gains to operate actuators.
Ultra-Fast Settling Time & Excellent Position Accuracy
Position sensors constantly measure and maintain the isolation system's position using a digital signal processor, greatly enhancing accuracy. Accelerometers swiftly detect floor or stage vibrations, transmitting signals to actuators for instant vibration cancellation.
VEC delivers turnkey solutions for vibration isolation, magnetic field cancellation, and acoustic abatement for your laboratory. You get expert guidance in product selection, transparent design, on-site installation, and post-sale support for sustained performance with us.
VEC reviews instrument specifications, site testing data, and facility layout to select the product most suitable for your requirements.
VEC provides design documents based on instrument footprint, product details, and project drawings to communicate the proposed solution before purchase. Seismic calculations and stamped structural drawings are available as needed.
VEC ensures production accuracy based on the design and will keep project members abreast of timelines and delivery details.
VEC strives to clearly coordinate with the many project stakeholders, including architects, facilities, contractors, and equipment manufacturers.
VEC engineers will provide on-site installation services to ensure your systems' proper installation and performance. VEC provides installation reports documenting the installation and system performance.
VEC stands behind its products and performance beyond the sale and installation, and engineers are available for support as needed.
Dedication to Quality
All Daeil systems are TUV and CE certified. Both Daeil and VEC provide a one-year warranty on all DVIA-P products.
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