Active Vibration Isolation

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Active Vibration Isolation Products

DVIA-ML

Ultra-High-Resolution Electron Microscopes

The premiere low-profile active vibration isolation platform reduces vibrations in the critical 1 – 10 Hz range.

DVIA-MLP

Outstanding Performance, Optimized for SEMs

The low-profile design preserves the SEM's ergonomics while isolating vibrations from 0.5 Hz, achieving 80-90% isolation at 1 Hz.

DVIA-U

SEMs, FIBs, Dual Beams, & Analytical Equipment

Low-profile, modular system that provides active isolation for instruments up to 700 kg.

DVIA-UB

SEMs, FIBs, Dual Beams, & Analytical Equipment

Low-profile, cost-effective platform that provides active isolation for instruments up to 1000 kg.

DVIA-P

Semiconductor, Metrology, & Inspection Tools

An active vibration isolation system integrating with motorized linear stages requires an ultra-fast settling.

DVIA-T

Precision Tabletop Microscopes & Instruments

Simple, easy-to-install tabletop active vibration isolation platform delivers 40 – 80% vibration isolation at 1 Hz.

Technical Benefits

Customization for Your Tools & Facility

We customize solutions to your unique requirements, considering facility vibration, tool weight, footprint, center of mass, and internal operations. After reviewing the data, we will design a tailored solution, incorporating pedestals for raised floors, seismic restraints, and non-isolated platforms for ancillary equipment and enclosures as needed.

Out-of-the-Box Feed Forward Control

DVIA active isolation systems come equipped with feedforward controls on all models. These controls use real-time ground sensor measurements to detect and preemptively cancel vibrations before reaching the isolated mass. The dynamic control adapts seamlessly to changing vibration levels and self-optimizes, ensuring consistent outstanding performance.

More Resistant to Variations in Floor Stiffness

Feedforward controls and passive component design depend less on floor stiffness than piezoelectric systems. As a result, VEC can install a DVIA active vibration isolation system on any building floor and most floor surfaces, unlike other options on the market.

Active Vibration Isolation in All Six Degrees of Freedom

All DVIA Systems control vibrations in three translational degrees of motion (X, Y, and Z) and three rotational degrees of motion (pitch, roll, and yaw.)

On-Site Optimization for Better Performance

Vibration levels vary based on location, sources, and other factors. Our engineer optimizes the feedback and feedforward control systems for optimal vibration isolation performance based on instrument size, weight, and your site's vibration characteristics.

Turnkey Solutions

VEC delivers turnkey solutions for vibration isolation, magnetic field cancellation, and acoustic abatement for your laboratory. You get expert guidance in product selection, transparent design, on-site installation, and post-sale support for sustained performance with us.

Product Selection

VEC reviews instrument specifications, site testing data, and facility layout to select the product most suitable for your requirements.

Design

VEC provides design documents based on instrument footprint, product details, and project drawings to communicate the proposed solution before purchase. Seismic calculations and stamped structural drawings are available as needed.

Production

VEC ensures production accuracy based on the design and will keep project members abreast of timelines and delivery details.

Stakeholder Coordination

VEC strives to clearly coordinate with the many project stakeholders, including architects, facilities, contractors, and equipment manufacturers.

Installation

VEC engineers will provide on-site installation services to ensure your systems' proper installation and performance. VEC provides installation reports documenting the installation and system performance.

Support

VEC stands behind its products and performance beyond the sale and installation, and engineers are available for support as needed.

Installation Examples

Downloads & Videos

Industry Leading Active Vibration Isolation

Technical Blogs & Case Studies

November 2, 2023 - Vibration Isolation Blogs

Vibration Isolation for Cryo-TEM: Over 90% Measured Reduction at 2 Hz

Using a Cryo-TEM in structural biology imaging requires a stable platform to create the 3D images researchers demand. Unfortunately, many facilities that require Cryo-TEM instrumentation ...

October 4, 2023 - Vibration Isolation Blogs

Isolated Slabs: Do they work? What does the data say?

VEC works with many customers who either have installed or consider installing “Isolation Slabs” to isolate an instrument from building vibration and other sources of ...

March 28, 2022 - Vibration Isolation Blogs

DVIA-M vs Piezoelectric Vibration Isolation Systems. Which is King?

The Daeil DVIA-M series vibration isolations system is the premier active vibration isolation system with excellent broadband vibration isolation and superior performance at low frequencies.

June 30, 2020 - Site Evaluations Vibration Isolation Blogs

Electron Microscope Vibration: An Increasing Issue in Today’s Laboratories

Electron microscope vibration is an increasing concern in modern laboratories because of improving resolution and extended duration imaging. At higher resolution, external vibrations have a ...

January 12, 2020 - Vibration Isolation Blogs

Active vs. Passive Vibration Isolation

Active vs. passive vibration isolation, understanding the difference is critical to mitigating the impacts of vibration on equipment performance. Passive isolation systems use the natural ...

January 8, 2020 - Site Evaluations Vibration Isolation Blogs

What are VC-Curves, why are they useful, and how are they relevant?

Vibration Criteria Curves, or VC-Curves, are a standard way to report vibration. They are helpful because they allow users to compare vibration levels across locations ...

August 27, 2019 - Site Evaluations Vibration Isolation Case Studies

Overcoming Microscopy Interference When You Can’t Find the Source of the Problem

Lawrence Berkeley National Laboratory (LBNL) is a national laboratory located in Berkeley, CA, with a focus on bringing together multidisciplinary teams of researchers to advance ...

August 27, 2019 - Site Evaluations Vibration Isolation Blogs

Understanding and Mitigating Vibration In Your Facility

Low-frequency and high-frequency vibration both have a significant impact on electron microscopy laboratories and high-tech manufacturing facilities. These two types of vibration stem from different ...

July 16, 2019 - Site Evaluations Vibration Isolation Magnetic Field Cancellation Acoustic Abatement Blogs

Site Survey: Why Use a Third-Party?

When purchasing or moving a new electron microscope or process tool, customers have a few options when it comes to deciding who should provide their ...

April 30, 2019 - Site Evaluations Vibration Isolation Acoustic Abatement Case Studies

Cutting Edge Semiconductor Facility In An Old Building On A High Floor?

A VEC site evaluation for an architectural firm helped make a challenging space work for vibration sensitive semiconductor tools for a new manufacturing program.

April 30, 2019 - Site Evaluations Vibration Isolation Magnetic Field Cancellation Acoustic Abatement Case Studies

Cleanroom Site Evaluation – An Avoided Disaster

A growing semiconductor company in the USA is evaluating a new location for its cleanroom space. The company wants to ensure that magnetic fields, acoustic ...

November 21, 2017 - Vibration Isolation Acoustic Abatement Blogs

Reducing Vibration from Mechanical Equipment in an Electron Microscopy Lab

Discussion: Reducing Vibration from Mechanical Equipment in an Electron Microscopy Lab: Laboratories often have vibrating equipment that causes disturbances on electron microscope images.

Let’s get in touch

Active Vibration Isolation

Customization for Your Tools & Facility

Out-of-the-Box Feed Forward Control

More Resistant to Variations in Floor Stiffness

Active Vibration Isolation in All Six Degrees of Freedom