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Industry Leading Active Vibration Isolation

The active vibration isolation system is the essential vibration control system for the advanced ultra-precision industry that enables nanoscale measurements.  The real-time feedback and feed-forward control system effectively reduce the low-frequency vibration from both a payload and the floor.  The active isolation system is widely used in ultra-precision metrology, such as advanced semiconductor fabrication plants, display, nanotechnology, and nanofabrication research.

We help organizations mitigate vibration within their facility so that they can experience the manufacturer’s stated performance levels for their equipment. Daeil Systems active vibration isolation systems can play a crucial role in meeting the performance requirements of your capital investment.

Download/Product Guide: Daeil DVIA Brochure
Application Areas
Conventional High-Resolution Requirements (<1000kg)
  • Scanning Electron Microscopes (SEM)
  • Analytical Tools
Recommended Product
DVIA-UB Platform
Ultra-High-Resolution Requirements (<3000kg)
  • Scanning Electron Microscopes (SEM)
  • Transmission Electron Microscopes (TEM)
  • Scanning Transmission Electron Microscopes (STEM)
Recommended Product
DVIA-MB Series
DVIA-MB Series
Semiconductor and Display Manufacturing
  • Process Tools
  • Metrology Tools
  • Inspection Tools
Recommended Product
DVIA-P Series
DVIA-P Series

Daeil Systems Offers a Best-In-Class Solution

Daeil has been a true innovator in active vibration isolation technology for more than 35 years. Their products undergo continuous improvement to keep pace with the increasing resolution and accuracy demands. 

Vibration Engineering Consultants is the proud exclusive distributor of Daeil isolation systems in the Americas:  

Daeil Systems designed these products specifically to meet the vibration isolation requirements of high-resolution electron microscopy and semiconductor applications.

At VEC, we are enthusiastic about Daeil Systems’ outstanding track record of performance, dedication to customer support, and unparalleled commitment to quality. All Daeil Systems come with a three-year warranty and are TUV and CE certified.

If you have questions about how to reduce vibration in your facility, contact us today! We can help you discover the right system to isolate your equipment from vibration within your facility.

Read our blog post about mitigating vibration in your facility.

Vibration Reduction for Sensitive Instruments